Domestic immersion DUV lithography machines have started small batch production, with plans to deliver about 5 units this year

According to a report by The Information citing informed sources, a Shanghai state-owned company whose name has not been disclosed has begun producing domestically-made immersion DUV lithography machines, planning to manufacture about 5 units this year and increase to about 20 units by 2027. The first batch of equipment will be delivered to major foundries such as SMIC, Hua Hong Semiconductor, and ChangXin Technology, but the equipment still needs to undergo verification for accuracy, stability, and production line compatibility, a process that may take several months or even longer.

Currently, most components of the equipment come from domestic sources, but some key parts still rely on Japan, and the performance and manufacturing quality lag behind ASML. In comparison, ASML is set to deliver about 131 immersion DUV lithography machines as early as 2025. Although domestic equipment has made the leap from prototype testing to small-scale production, there is still a significant gap before it can replace ASML on a large scale. Previously, Reuters reported that the U.S. is considering tightening restrictions on the export of lithography equipment to China and on maintenance services in China, and the delivery of domestic equipment coincides with this backdrop.